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Today's NFPA 318 safeguards people and property in plants and research facilities.
NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities is an essential reference for facility owners and managers, plant safety directors, safety trainers, risk insurers, and AHJs. The latest requirements in this Standard are applicable to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled, and in which a cleanroom, clean zone or both are present. 28pp.
Major technical changes and revisions in the 2009 edition include:
First-time requirements for Sub Atomic Gas (SAG) Systems
New requirements involving exhaust ducts
Maximum hazardous chemical quantities at a workstation limited to 3 cylinders to reduce change-out frequency
Revisions to safety considerations for chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, and production and support equipment
NFPA 318 - Standard for the Protection of Semiconductor Fabrication Facilities, 2009